Abstract
Electrodiffusion of `sweeping' has been used to remove impurities from quartz material. Traditionally, quartz is swept in the bar form prior to being cut into wafers. It is argued that it wo...
Abstract
This paper reports a novel process to fabricate electrostatically-actuated, in-plane micromechanical resonators made of fused quartz for high-Q microsensor applications. Two key processes - ...
Following the classification of quartz as a human carcinogen by the IARC, many standard-setting committees are currently trying to convert this hazard into their national or EU standards. Since human ...
Fibrogenic effects of amorphous quartz dusts are discussed more and more during recent years. In order to study alterations due to amorphous silica (quartz glass VP 203-006) in comparison with crystal...