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  • Quarter- and sub-quarter-micron optical lithography
  • Abstract Will optical lithography finally have reached its ultimate limit at a quarter micrometer minimum feature size? The author shows the obstacles in the projection and the resist systems that pr...
  • Rating:   1 Star      Views: (2007)     Pages: (0)     Uploaded: Publication Date: 22-24 May 1991
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  • Thermal channel noise of quarter and sub-quarter micron NMOSFET's
  • Abstract We present a simple and efficient method for the extraction of thermal channel noise of MOSFET's in quarter and sub-quarter micron technologies from NF50 (noise figure at 50 ohm source resis...
  • Rating:   1 Star      Views: (2003)     Pages: (0)     Uploaded: Publication Date: 2000
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