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- ALD growth of Ru on RIE-pretreated TaN substrate
- Abstract The polycrystalline ruthenium films were grown on TaN substrates by atomic layer deposition at temperatures ranging from 300 degC to 330 degC using bis(cyclopentadienyl) ruthenium [RuCp2] an...
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Uploaded: Publication Date: 23-26 Oct. 2006
- ALD growth of Ru on RIE-pretreated TaN substrate
- Abstract The polycrystalline ruthenium films were grown on TaN substrates by atomic layer deposition at temperatures ranging from 300 degC to 330 degC using bis(cyclopentadienyl) ruthenium [RuCp2] an...
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Views: (2000)
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Uploaded: Publication Date: 23-26 Oct. 2006
- Investigation of Ni reaction with amorphous SiGeC thin film
- Abstract The reaction between Ni and amorphous SiGeC thin film on SiO2 substrate is investigated. Four point probe (FPP), X-ray diffraction (XRD) and Auger electron spectroscopy (AES) depth profiling...
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Uploaded: Publication Date: 23-26 Oct. 2006
- Investigation of Ni reaction with amorphous SiGeC thin film
- Abstract The reaction between Ni and amorphous SiGeC thin film on SiO2 substrate is investigated. Four point probe (FPP), X-ray diffraction (XRD) and Auger electron spectroscopy (AES) depth profiling...
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Uploaded: Publication Date: 23-26 Oct. 2006
- Improved barrier properties of ultrathin Ru film with TaN interlayer f...
- Abstract The properties of ultrathin ruthenium (~5 nm)/TaN(~5 nm) bilayer as the copper diffusion barrier are studied. Cu, Ru, and TaN thin films are deposited by using the ion beam sputtering techni...
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Uploaded: Publication Date: Apr 2006
- Investigation of Ru/TaN on low dielectric constant material with k=2.7
- Abstract The properties of the ruthenium (Ru)/ TaN as copper diffusion barrier in copper low dielectric constant material(low-k) metallization were studied by sheet resistance, X-ray diffraction (XRD...
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Uploaded: Publication Date: 23-26 Oct. 2006
- Investigation of Ru/TaN on low dielectric constant material with k=2.7
- Abstract The properties of the ruthenium (Ru)/ TaN as copper diffusion barrier in copper low dielectric constant material(low-k) metallization were studied by sheet resistance, X-ray diffraction (XRD...
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Views: (2000)
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Uploaded: Publication Date: 23-26 Oct. 2006
- Robust embedded control for N-L robot manipulators with dynamicuncerta...
- Abstract The use of a robust control strategy for continuous path control of robot manipulators to track a desired trajectory is presented. In the system, large parameter uncertainties, such as joint...
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Uploaded: Publication Date: 9-13 Nov 1992