Study of the effect of gas pressure and catalyst droplets number density on silicon nanowires growth, tapering, and gold coverage

W. H. Chen, R. Larde, E. Cadel, T. Xu, B. Grandidier et al. We investigated the growth of silicon nanowires from Au-rich catalyst droplets by two different methods: chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). The growth rate is found to be diameter-dependent and increases with increasing precursor partial pressures. The comparison of th ... [J. Appl. Phys. 107, 084902 (2010)] published Wed Apr 21, 2010.

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