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Measurement of rotational temperature using SiH(ADelta-XPi) emission spectrum in SiHH plasmas
Thu, 2010-09-09 01:00 — Anonymous
Se Youn Moon, W. Y. Kim, H. C. Lee, S. W. Ahn, H. M. Lee et al. Based on the synthetic spectrum method of comparing with the experimental SiH(ADelta-XPi) diatomic molecular emission spectrum, the rotational temperatures of SiHH plasmas were investigated for various operating conditions. The plasma was generated between parallel plate electrodes biased at 40.68 M ... [Phys. Plasmas 17, 083501 (2010)] published Wed Aug 11, 2010.
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