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Abstract: [Zone of thermal neutrality during seasonal adaptation of man to high temperature] [Artic le in Russian] Khudai berdiev MD. PMID: 1786864 [PubMed - indexed for MEDLINE]
Abstract This paper introduces a new implant monitoring tool, the Therma-Probe 500 (TP500), capable of fully automated real-time measurements on product wafers. This new Therma-Probe combines a 100% increase in throughput with a state-of-the-art pattern recognition system to enable quick and effortless location and measurement of sites as small as 10 ?m×10 ?m anywhere on product wafers. This paper also demonstrates that the new TP500 system has excellent sensitivity in monitoring implant dose and energy
Abstract A technique has been developed using the Therma-Wave Therma-Probe which allows the quantification of the angle of incidence of the ion beam to the wafer crystal structure in a parallel scanned implanter. A Therma-Wave value vs. incident angle calibration curve is developed from an electrostatically scanned implanter where the variation in beam incident angle varies significantly over the wafer and is well characterized. This calibration curve is then applied to maps of wafers implanted in a parallel scanned implanter, the Eaton NV-820...
Studies of the effects of hyperthermia on neoplastic tumors have been developed on the basis of biology. At the some time, machines for the clinical application of hyperthermia have been slowly improved. The Therma Tech 2,000, however, unlike most other pieces of hyperthermia equipment, generates RF energy at 13.56MHz. In the present study, rabbits bearing VX2 tumors were given hyperthermia treatment and measurements of their temperatures were taken.
Abstract A new nondestructive technique, the modulated reflectance or thermal wave imaging, was used to observe the formation of defects at the surface and under the surface of metal lines, after successive steps of conventional accelerated electromigration (EM) stress. The change in film morphology and the growth of subsurface defects was correlated with the EM stress data and with the ultimate time to failure of the lines. As the wafer was heated during the EM TEST a set of lines that were not electrically stressed were also imaged at each s...
The authors present the use of Uterine Balloon Therapy in the long term metrorrhagia resistant to conservative treatment, in the case of porphyria. The method was used on a 44 year old female, suffering from acute intermittent liver porphyria for 9 years.
A clinical tip is suggested to assist in the removal of Therma-fil obturators during conventional endodontic retreatment. Using a heat source such as the System-B, the plastic carriers that are normally an obstacle to retreatment can be efficiently removed using the technique described.
Abstract A new nondestructive technique, the modulated reflectance or thermal wave imaging, was used to observe the formation of defects at the surface and under the surface of metal lines, after successive steps of conventional accelerated electromigration (EM) stress. The change in film morphology and the growth of subsurface defects was correlated with the EM stress data and with the ultimate time to failure of the lines. As the wafer was heated during the EM TEST a set of lines that were not electrically stressed were also imaged at each s...
Abstract We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin metal films.
Abstract A new advanced application of the therma-probe systems for high-resolution mapping of implant and anneal non-uniformities is described.
Abstract A new advanced application of the therma-probe systems for high-resolution mapping of implant and anneal non-uniformities is described.
Abstract Therma-wave (TW) dose measurement is one of the standard technologies used in the semiconductor field to monitor the process of ion implantation. One of the main advantages of this technique, in addition to its nondestructiveness and the lack of additional processing, is the wide range of implant conditions (dose and energy) over which the technique is effective. However, it has long been recognized that there can be substantial variations in the dose sensitivity of this technique depending on the TW value. The plot of dose sensitivit...
The Food and Drug Administration (FDA) has determined the regulatory review period for Therma Choice5 Uterine Ballon Therapy System and is publishing this notice of that determination as required by law. FDA has made the determination because of the submission of an application to the Commissioner of Patents and Trademarks, Department of Commerce, for the extension of a patent which claims that medical device.
Abstract We have developed a method for measuring the thickness of thin films that is nondestructive, noncontact and that can make measurements with 2-µm spatial resolution (i.e., 2-µm spot size) on both optically opaque as well as optically transparent films. With this method, which is based on the use of high-frequency thermal waves, thicknesses of Al and SiO2 films on Si substrates have been measured in the 500–25?000-Å range.
Abstract We describe a new technique for measuring the thickness and optical constants of dielectric, semiconducting, and thin metal films. Beam profile reflectometry provides excellent precision for films as thin as 30 Å and as thick as 20?000 Å. The technique is also capable of simultaneous 2 and 3 parameter measurements and it performs all measurements with a submicron spot size.
Abstract Quantitative analysis of ion-implanted layers in Si using the damage-based theoretical modeling and experimental results obtained with the photomodulated reflectance (PMR) technique are described. Our theoretical approach [A. Salnick and J. Opsal, J. Appl. Phys. 91, 2874 (2002)] combines calculations of the ion-induced damage depth profiles in semiconductors with the corresponding scaling of the thermal and carrier plasma wave parameters followed by the calculation of the photothermal response from a multilayered sample. Comparison of...