Pressure control of rf bias for sputtering
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IEEE
(0) (0 Votes)Views: (2001) Date: (Publication Date: Dec 1976) Pages: () -
Author: Kochel L. J. Sperry-Univac Computer Systems Univac Park St. Paul Minnesota 55165;
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Abstract: Abstract A method of simultaneously controlling vacuum pressure and substrate bias using only a pressure controller is described for an rf bias sputtering system in which the bias is developed through substrate tuning.
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Pressure (the symbol: p) is the force per unit area applied in a direction perpendicular to the surface of an object. Gauge pressure (also spelled gage pressure) is the ... - Blood pressure - Wikipedia, the free encyclopedia
Blood pressure (BP) is the pressure exerted by circulating blood upon the walls of blood vessels, and is one of the principal vital signs. When used without further ... - Atmospheric pressure - Wikipedia, the free encyclopedia
Atmospheric pressure is the force per unit area exerted into a surface by the weight of air above that surface in the atmosphere of Earth (or that of another planet). - Intracranial pressure - Wikipedia, the free encyclopedia
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Sound pressure or acoustic pressure is the local pressure deviation from the ambient (average, or equilibrium) atmospheric pressure caused by a sound wave. - Vapor pressure - Wikipedia, the free encyclopedia
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Oncotic pressure, or colloid osmotic pressure, is a form of osmotic pressure exerted by proteins in blood plasma that usually tends to pull water into the circulatory system. - Partial pressure - Wikipedia, the free encyclopedia
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