Fine crystalline grain model for the determination of the morphology of ultrathin amorphous silicon films

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    Views: (2000)   Date: (Publication Date: Feb 2002)   Pages: ()
  • Author:  Hazra  Sukti Sakata  Isao Yamanaka  Mitsuyuki Suzuki  Eiichi National Institute of Advanced Industrial Science and Technology  AIST Tsukuba Central 2  Umezono 1-1-1  Tsukuba  Ibaraki?305?8568  Japan;  

  • Abstract:  Abstract To obtain the morphology of ultrathin hydrogenated amorphous silicon (a-Si:H) films with thicknesses of 210 nm grown by thermal chemical-vapor deposition, we have utilized spectroscopic ellipsometry and introduced a model, called the fine crystalline grain model. This model resolves that the growth of the amorphous silicon matrix starts with the formation of dense deformed crystallites or paracrystallites. A better fit to the experimental data has been obtained with this model when the a-Si:H film thickness is below 20 nm. The fine grain component gradually decreases with the film growth. It has been clarified that the presence of deformed crystallites in the starting a-Si:H films acts as a constraint for their crystallization by rapid thermal annealing. 2002 American Institute of Physics.

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