Estimating oxide-trap, interface-trap, and border-trap charge densities in metal-oxide-semiconductor transistors


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      		Views: (2009)   Date: (Publication Date: Apr 1994)   Pages: ()

    • Author:  Fleetwood  D. M. Shaneyfelt  M. R. Schwank  J. R. Sandia National Laboratories  Department 1332  Albuquerque  New Mexico 87185-1083;  

    • Abstract:  Abstract A simple method is described that combines conventional threshold-voltage and charge-pumping measurements on n- and p-channel metal-oxide-semicond uctor (MOS) transistors to estimate radiation-induced oxide-, interface-, and border-trap charge densities. In some devices, densities of border traps (near-interfacial oxide traps that exchange charge with the underlying Si) approach or exceed the density of interface traps, emphasizing the need to distinguish border-trap contributions to MOS radiation response and long-term reliability from interface-trap contributions. Estimates of border-trap charge densities obtained via this new dual-transistor technique agree well with trap densities inferred from 1/f noise measurements for transistors with varying channel length.

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