Diffuse reflectance spectroscopy measurement of substrate temperature and temperature transient during molecular beam epitaxy and implications for low-temperature III–V epitaxy


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      		Views: (2011)   Date: (Publication Date: Mar 1997)   Pages: ()

    • Author:  Thompson  P. Li  Y. Zhou  J. J. Sato  D. L. Flanders  L. Lee  H. P. Department of Electrical and Computer Engineering  University of California–Irvine  Irvine  California 92697;  

    • Abstract:  Abstract We report diffuse reflectance spectroscopy (DRS) measurement of Knudsen cell induced radiative heating of the sample during molecular beam epitaxy of GaAs at substrate temperatures between 200 and 600?°C. The temperature rises, as large as 12?°C, were observed for In-bonded samples at a substrate temperature of 200?°C. As-grown GaAs layers deposited between 200 and 300?°C are characterized using double crystal x-ray diffraction. The onset of a distinct x-ray peak associated with the low-temperature grown GaAs layer is identified, at a DRS measured temperature between 260 and 270?°C. © 1997 American Institute of Physics.

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