Detection of thermal waves through optical reflectance
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(0) (0 Votes)Views: (2001) Date: (Publication Date: Jun 1985) Pages: () -
Author: Rosencwaig Allan Opsal Jon Smith W. L. Willenborg D. L. Therma-Wave Inc. Fremont California 94539;
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Abstract: Abstract We show that thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature. Applications to the study of microelectronic materials are illustrated by an example of measuring the thickness of thin metal films.
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