Mechanism of Vfb roll-off with High Work function Metal Gate and Low Temperature Oxygen Incorporation to Achieve PMOS Band Edge Work function

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    Views: (2012)   Date: (Publication Date: 10-12 Dec. 2...)   Pages: ()
  • Author:  Song  S.C. Park  C.S. Price  J. Burham  C. Choi  R. Wen  H.C. Choi  K. Tseng  H.H. Lee  B.H. Jammy  R. SEMATECH  Austin;  

  • Abstract:  Abstract Vfb roll-off phenomena in high work function (WF) metal gate on high-k is successfully explained by progressive oxygen vacancy (Vo +) generation in high-k as bottom oxide scales. Based on this understanding, low temperature O incorporation (LTOI) process has been developed, which reduces PMOS Vt significantly by enriching high-k with O without increasing equivalent oxide thickness (EOT).

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