Mechanism of Vfb roll-off with High Work function Metal Gate and Low Temperature Oxygen Incorporation to Achieve PMOS Band Edge Work function
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(0) (0 Votes)Views: (2012) Date: (Publication Date: 10-12 Dec. 2...) Pages: () -
Author: Song S.C. Park C.S. Price J. Burham C. Choi R. Wen H.C. Choi K. Tseng H.H. Lee B.H. Jammy R. SEMATECH Austin;
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Abstract: Abstract Vfb roll-off phenomena in high work function (WF) metal gate on high-k is successfully explained by progressive oxygen vacancy (Vo +) generation in high-k as bottom oxide scales. Based on this understanding, low temperature O incorporation (LTOI) process has been developed, which reduces PMOS Vt significantly by enriching high-k with O without increasing equivalent oxide thickness (EOT).
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