Highly uniform 4-inch diameter InGaAs/InP epitaxial wafer forPIN-PD application
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(0) (0 Votes)Views: (2005) Date: (Publication Date: 2002) Pages: () -
Author: Doi H. Iguchi Y. Kimura H. Iwasaki T. Miura Y. Yokogawa M. Epi Solution Div. Sumitomo Electr. Industries Ltd. Hyogo;
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Abstract: Abstract InGaAs/InP epitaxial layers were grown on four-inch S-doped InP substrates using production-scale organometallic vapor-phase epitaxy (OMVPE) system. High uniformity has been obtained by optimizing the growth conditions. For example, thickness uniformity of 1.09% in InGaAs layer, 1.39% in InP layer has been obtained. Also low dark current (<0.3 nA/200 ?m ? at VR=5 V) has been achieved in planar type PIN-PD device. These results will highlight the large-diameter InGaAs/InP epitaxial growth for device cost performance
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