Selective MOVPE growth of (Al)GaAs using DMGaCl and DMAlCl


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    Views: (2008)   Date: (Publication Date: 2000)   Pages: ()
  • Author:  Philippens  M. Giesen  Ch. Gerard  B. Rushworth  S. Heime  K. Inst. fur Halbleitertechnik  Tech. Hochschule Aachen;  

  • Abstract:  Abstract We report on the selective growth using the precursors dimethylgallium-chlo ride and dimethylaluminumchlo ride. They were selected to obtain good selectivity together with high growth rates, without using elevated source temperatures. The vapour pressures of these precursors were determined. The need for high growth temperatures was demonstrated. Growth rates of more than 5 ?m/h were achieved. An influence of the stripe orientation on the morphology was observed for the growth of AlGaAs

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