Production implant monitoring using the Therma-Probe 500
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(0) (0 Votes)Views: (2008) Date: (Publication Date: 16-21 Jun 19...) Pages: () -
Author: Pearce N. Li Zhou Graves P. Takeo H. Romig T. Therma-Wave Inc. Fremont CA;
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Abstract: Abstract This paper introduces a new implant monitoring tool, the Therma-Probe 500 (TP500), capable of fully automated real-time measurements on product wafers. This new Therma-Probe combines a 100% increase in throughput with a state-of-the-art pattern recognition system to enable quick and effortless location and measurement of sites as small as 10 ?m×10 ?m anywhere on product wafers. This paper also demonstrates that the new TP500 system has excellent sensitivity in monitoring implant dose and energy
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