Quasi-breakdown of ultrathin gate oxide under high field stress
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(0) (0 Votes)Views: (2005) Date: (Publication Date: 11-14 Dec 19...) Pages: () -
Author: Seok-Hee Lee Byung-Jin Cho Jong-Choul Kim Soo-Han Choi Semicond. R&D Lab. Hyundai Electron. Indust. Co. Ltd. Kyoungki;
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Abstract: Abstract A new oxide failure mode of ultrathin gate oxide is reported. During high constant current stressing, VG variation with time shows two distinct modes, i.e., a stable mode and a fluctuation mode named as quasi-breakdown. Once the quasi-breakdown starts, gate current in low field abruptly increases. From the experimental results, it could be concluded that the quasi-breakdown occurs when injected electrons travel in the oxide conduction band ballistically. Localized physical damage near the Si/SiO2 interface is believed to be the cause of the quasi-breakdown, The great increase of gate current after the quasi-breakdown was modeled by a superposition of F-N tunneling current and direct tunneling current with a finite series resistance, and a good agreement has been found
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