Simulation Based Comparison Of Semiconductor Amhs Alternatives Continuous Flow Vs Overhead Monorail

Abstract:  Automation is an essential component in today's semiconductor manufacturing As factories migrate to 300 mm technology, automated handling becomes increasingly important for variety of ergonomic, safety, and yield considerations. Traditional semiconductor AMHS systems, such as the Overhead Monorail Vehicles (OMV) or Overhead Hoist, can be overly expensive. Cost projections for a 300ram inter/intrabay AMHS installation are in the range of $50M - $100M. As an alternative, a lower cost alternative AMHS, called Continuos Flow Transport has been proposed. The CFT system is similar to what has historically been identified as a conveyor based movement syster The CFT system provides cost savings at reduced flexibility and longer delivery time. This study compares the CFT to Overhead Monorail transport, determining a cumulative delivery time distribution. As expected, the CFT system requires a longer average delivery time interval than OMV, but may provide total savings through reduced transport variability.